BPSG硼磷硅玻璃
1.Analysis and Research Results of BPSG on Abnormal Problem;硼磷硅玻璃缺陷分析与研究
2.The borophosphosilicate glass(BPSG) layers as the filling coatings to silica-based planar lightwave circuits were obtained by using plasma enhanced chemical vapor deposition with SiH_4/N_2O and PH_3,B_2H_6.利用等离子体增强化学气相沉积方法,在S iH4/N2O反应气体中掺入PH3和B2H6制备了用于硅基S iO2平面光波导的硼磷硅玻璃覆盖层。
3.As an important inter-layer dielectric, BPSG thin films deposited by atmospheric pressure chemical vapor deposition (APCVD) were used widely in most wafer techniques.BPSG(硼磷硅玻璃)薄膜作为一种重要的层间介质,在半导体集成电路中广泛使用。
3)psg磷硅酸玻璃
4)phosphosilicate glass (PSG)硅酸磷玻璃
5)phosphorus silicate glasses磷硅酸盐玻璃
6)sacrificial PSG磷硅玻璃牺牲层
延伸阅读
玻璃硅料是指用做生产玻璃原料的硅质岩(砂)等，主要有如下几类：（1）玻璃原料：天然海砂、普通石英砂、石英粉、水晶砂、水晶粉、钾钠长石、氟硅酸钾、氟硅酸钠、玻璃微珠（2）玻璃产品：钢化玻璃、中空玻璃、防弹玻璃、夹层玻璃、防火玻璃、安全玻璃、汽车玻璃、光学玻璃、镀膜玻璃、浮法玻璃、玻璃器皿、玻璃工艺品、玻璃瓶、平板玻璃、玻璃仪器、玻璃纤维、玻璃陶瓷、玻璃钢、特种玻璃、玻璃搪瓷等等
